标题
Surface study of RF magnetron sputtered silicon nitride thin films
作者
关键词
-
出版物
Journal of Optoelectronic and Biomedical Materials
Volume 15, Issue 2, Pages 55-64
出版商
Virtual Company of Physics
发表日期
2023-04-25
DOI
10.15251/jobm.2023.152.55
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Effect of 2 MHz frequency power applied to the substrate for low-temperature silicon nitride thin film deposition
- (2022) Sejin Ahn et al. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
- COMPOSITION, STRUCTURE, AND FUNCTIONAL PROPERTIES OF THIN SILICON NITRIDE FILMS GROWN BY ATOMIC LAYER DEPOSITION FOR MICROELECTRONIC APPLICATIONS (REVIEW OF 25 YEARS OF RESEARCH)
- (2022) V. Yu. Vasiliev JOURNAL OF STRUCTURAL CHEMISTRY
- Heterojunction of SnO2 nanosheet/arrayed ZnO nanorods for humidity sensing
- (2022) M.H. Mamat et al. MATERIALS CHEMISTRY AND PHYSICS
- An Optical Planar Waveguide-Based Immunosensors for Determination of Fusarium Mycotoxin Zearalenone
- (2021) Alexei Nabok et al. Toxins
- Low-Temperature and Low-Pressure Silicon Nitride Deposition by ECR-PECVD for Optical Waveguides
- (2021) Dawson B. Bonneville et al. Applied Sciences-Basel
- Effect of sputtering pressure on the optical and electrical properties of ITO film on fluorphlogopite substrate
- (2021) Hai Zhang et al. APPLIED SURFACE SCIENCE
- Influences of different sputtering current on the microstructure and electrical properties of silicon nitride thin films deposited on cemented carbide tools
- (2021) Di Zhou et al. CERAMICS INTERNATIONAL
- Effect of the post-heating temperatures on the microstructure, mechanical and electrical properties of silicon nitride thin films
- (2021) Lei Huang et al. CERAMICS INTERNATIONAL
- Effect of reactive gases (NH3/N2) on silicon–nitride thin films deposited with diiodosilane (SiH2I2) precursors
- (2021) Baek-Ju Lee et al. JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Silicon Nitride and Hydrogenated Silicon Nitride Thin Films: A Review of Fabrication Methods and Applications
- (2021) Nikolett Hegedüs et al. Materials
- Study of DC Magnetron Sputtered Nb Films
- (2021) He Gao et al. Crystals
- Silicon nitride deposited by laser assisted plasma enhanced chemical vapor deposition for next generation organic electronic devices
- (2020) Ki Hyun Kim et al. APPLIED SURFACE SCIENCE
- Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness
- (2018) Rongbo Wu et al. Nanomaterials
- The role of target-to-substrate distance on the DC magnetron sputtered zirconia thin films’ bioactivity
- (2011) Arisara Thaveedeetrakul et al. APPLIED SURFACE SCIENCE
- Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study
- (2011) M.A. Signore et al. OPTICAL MATERIALS
- AFM investigation of tribological properties of nano-patterned silicon surface
- (2008) D. Marchetto et al. WEAR
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now