Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

出版年份 2011 全文链接

标题

Deposition of silicon nitride thin films by RF magnetron sputtering: a material and growth process study

作者

关键词

-

出版物

OPTICAL MATERIALS

Volume 34, Issue 4, Pages 632-638

出版商

Elsevier BV

发表日期

2011-10-23

DOI

10.1016/j.optmat.2011.09.012

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