A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas

标题
A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas
作者
关键词
-
出版物
PLASMA SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
出版商
IOP Publishing
发表日期
2023-01-21
DOI
10.1088/2058-6272/acb52c

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