A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas

Published 2023 View Full Article

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Title
A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas
Authors
Keywords
-
Journal
PLASMA SCIENCE & TECHNOLOGY
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2023-01-21
DOI
10.1088/2058-6272/acb52c

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