High-Precision Thickness Measurement of Cu Film on Si-Based Wafer Using Erasable Printed Eddy Current Coil and High-Sensitivity Associated Circuit Techniques
出版年份 2021 全文链接
标题
High-Precision Thickness Measurement of Cu Film on Si-Based Wafer Using Erasable Printed Eddy Current Coil and High-Sensitivity Associated Circuit Techniques
作者
关键词
-
出版物
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 69, Issue 9, Pages 9556-9565
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2021-09-16
DOI
10.1109/tie.2021.3111570
参考文献
相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。- Eddy Current Probe With Three-Phase Excitation and Integrated Array Tunnel Magnetoresistance Sensors
- (2020) Na Zhang et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Experimental Analysis and Optimization of a Contactless Eddy-Current-Based Speed Sensor for Smooth Conductive Surfaces
- (2019) Cheng Gong et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Fabrication Techniques for Manufacturing Flexible Coils on Textiles for Inductive Power Transfer
- (2018) Neil J. Grabham et al. IEEE SENSORS JOURNAL
- Multi-parameter Eddy-current Sensor Design for Conductivity Estimation and Simultaneous Distance and Thickness Measurements
- (2018) Kok-Meng Lee et al. IEEE Transactions on Industrial Informatics
- Challenges facing copper-plated metallisation for silicon photovoltaics: Insights from integrated circuit technology development
- (2018) Alison Lennon et al. PROGRESS IN PHOTOVOLTAICS
- Analysis and Design of Coil-Based Electromagnetic-Induced Thermoacoustic for Rail Internal-Flaw Inspection
- (2018) Wensong Wang et al. IEEE TRANSACTIONS ON INTELLIGENT TRANSPORTATION SYSTEMS
- A Thickness Measurement System for Metal Films Based on Eddy-Current Method With Phase Detection
- (2017) Wei Li et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces
- (2017) Boby George et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Probing dimensionality using a simplified 4-probe method
- (2017) Snorre B Kjeldby et al. JOURNAL OF PHYSICS-CONDENSED MATTER
- A Novel Triple-Coil Electromagnetic Sensor for Thickness Measurement Immune to Lift-Off Variations
- (2016) Wuliang Yin et al. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
- Thickness measurement using liftoff point of intersection in pulsed eddy current responses for elimination of liftoff effect
- (2016) Mengbao Fan et al. SENSORS AND ACTUATORS A-PHYSICAL
- Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation
- (2015) Hongbo Wang et al. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
- Improving sensitivity of an inductive pulse sensor for detection of metallic wear debris in lubricants using parallel LC resonance method
- (2013) Li Du et al. MEASUREMENT SCIENCE and TECHNOLOGY
- In-situ measurement of Cu film thickness during the CMP process by using eddy current method alone
- (2013) Zilian Qu et al. MICROELECTRONIC ENGINEERING
- Advanced wafer thinning technology and feasibility test for 3D integration
- (2013) Young Suk Kim et al. MICROELECTRONIC ENGINEERING
- Improvement of sensitivity of eddy current sensors for nano-scale thickness measurement of Cu films
- (2013) Zilian Qu et al. NDT & E INTERNATIONAL
- Eddy-Current Sensor Interface for Advanced Industrial Applications
- (2010) M. R. Nabavi et al. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
- Printed Spiral Winding Inductor With Wide Frequency Bandwidth
- (2010) Chi Kwan Lee et al. IEEE TRANSACTIONS ON POWER ELECTRONICS
- Multilayer planar rectangular coils for eddy current testing: Design considerations
- (2009) Javier O. Fava et al. NDT & E INTERNATIONAL
Publish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn MoreFind the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
Search