Graphene piezoresistive flexible MEMS force sensor for bi-axial micromanipulation applications
出版年份 2022 全文链接
标题
Graphene piezoresistive flexible MEMS force sensor for bi-axial micromanipulation applications
作者
关键词
-
出版物
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 28, Issue 7, Pages 1687-1699
出版商
Springer Science and Business Media LLC
发表日期
2022-06-17
DOI
10.1007/s00542-022-05312-w
参考文献
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