Simulation, fabrication and characterization of a 3D piezoresistive force sensor

标题
Simulation, fabrication and characterization of a 3D piezoresistive force sensor
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 147, Issue 2, Pages 430-435
出版商
Elsevier BV
发表日期
2008-05-22
DOI
10.1016/j.sna.2008.05.020

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