Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach

出版年份 2020 全文链接

标题

作者

关键词

出版物

Volume 33, Issue 4, Pages 1594-1608

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2020-12-30

DOI

10.1109/tnnls.2020.3042975

Discuss science. Find collaborators. Network.

Join a conversation

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started