Electrical and piezoresistive properties of titanium oxycarbide thin films for high-temperature pressure sensors
出版年份 2021 全文链接
标题
Electrical and piezoresistive properties of titanium oxycarbide thin films for high-temperature pressure sensors
作者
关键词
Titanium oxycarbide piezoresistive film, Electrical properties, Piezoresistive properties, Degenerate electrical conduction, High-temperature pressure sensor
出版物
VACUUM
Volume 193, Issue -, Pages 110550
出版商
Elsevier BV
发表日期
2021-08-26
DOI
10.1016/j.vacuum.2021.110550
参考文献
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