On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis

标题
On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis
作者
关键词
Energy-dispersive x-ray spectroscopy, Thin film, Carbon, Thickness
出版物
THIN SOLID FILMS
Volume 737, Issue -, Pages 138937
出版商
Elsevier BV
发表日期
2021-09-17
DOI
10.1016/j.tsf.2021.138937

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