Property approach of Si based ZnO films under thermal shock

标题
Property approach of Si based ZnO films under thermal shock
作者
关键词
ZnO, Magnetron sputtering, Thermal shock
出版物
CERAMICS INTERNATIONAL
Volume 47, Issue 20, Pages 28985-28991
出版商
Elsevier BV
发表日期
2021-07-09
DOI
10.1016/j.ceramint.2021.07.059

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