Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
出版年份 2021 全文链接
标题
Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
作者
关键词
-
出版物
Micromachines
Volume 12, Issue 8, Pages 991
出版商
MDPI AG
发表日期
2021-08-23
DOI
10.3390/mi12080991
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- The Michelangelo step: removing scalloping and tapering effects in high aspect ratio through silicon vias
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