Defect-mediated sputtering process of boron nitride during high incident angle low-energy ion bombardment
出版年份 2021 全文链接
标题
Defect-mediated sputtering process of boron nitride during high incident angle low-energy ion bombardment
作者
关键词
Secondary ion mass spectrometry, Molecular dynamics, Sputtering, Boron nitride, 2D materials
出版物
MEASUREMENT
Volume 179, Issue -, Pages 109487
出版商
Elsevier BV
发表日期
2021-04-27
DOI
10.1016/j.measurement.2021.109487
参考文献
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