Fabrication of highly conducting ZnO/Ag/ZnO and AZO/Ag/AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature

标题
Fabrication of highly conducting ZnO/Ag/ZnO and AZO/Ag/AZO transparent conducting oxide layers using RF magnetron sputtering at room temperature
作者
关键词
ZAZ, AAA, TCO, Magnetron sputtering and solar cells
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 129, Issue -, Pages 105801
出版商
Elsevier BV
发表日期
2021-03-14
DOI
10.1016/j.mssp.2021.105801

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