标题
Effect of Annealing Temperature on Microstructure and Resistivity of TiC Thin Films
作者
关键词
-
出版物
Coatings
Volume 11, Issue 4, Pages 457
出版商
MDPI AG
发表日期
2021-04-16
DOI
10.3390/coatings11040457
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Electrical and microstructural properties of Ta-C thin films for metal gate
- (2020) Litipu Aihaiti et al. Materials Research Express
- A Sensitive Pyrimethanil Sensor Based on Electrospun TiC/C Film
- (2019) Ling Sui et al. SENSORS
- Atomic Layer Deposition (ALD) of Metal Gates for CMOS
- (2019) Chao Zhao et al. Applied Sciences-Basel
- Enhancement of optical transmittance and electrical resistivity of post-annealed ITO thin films RF sputtered on Si
- (2018) Ahmad Hadi Ali et al. APPLIED SURFACE SCIENCE
- Lithium intercalation studies in cubic titanium carbide thin films
- (2018) Vishnu Dev APPLIED SURFACE SCIENCE
- Crystallization of SiC and its effects on microstructure, hardness and toughness in TaC/SiC multilayer films
- (2018) Suxuan Du et al. CERAMICS INTERNATIONAL
- Study of reaction sequences during MSR synthesis of TiC by controlled ball milling of titanium and graphite
- (2018) J.E. Oghenevweta et al. MATERIALS CHARACTERIZATION
- Effect of Ti Transition Layer Thickness on the Structure, Mechanical and Adhesion Properties of Ti-DLC Coatings on Aluminum Alloys
- (2018) Hongshuai Cao et al. Materials
- Formation of Titanium Carbide (TiC) and TiC@C core-shell nanostructures by ultra-short laser ablation of titanium carbide and metallic titanium in liquid
- (2017) Angela De Bonis et al. JOURNAL OF COLLOID AND INTERFACE SCIENCE
- Effect of carbon nanotubes irradiation by argon ions on the formation of SnO 2-x /MWCNTs composite
- (2017) S.N. Nesov et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Microstructure, chromaticity and thermal stability of SS/TiC-WC/Al 2 O 3 spectrally selective solar absorbers
- (2017) Xiang-Hu Gao et al. SOLAR ENERGY MATERIALS AND SOLAR CELLS
- Optical simulation, corrosion behavior and long term thermal stability of TiC-based spectrally selective solar absorbers
- (2017) Xiang-Hu Gao et al. SOLAR ENERGY MATERIALS AND SOLAR CELLS
- Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering
- (2016) Hailong Liang et al. CERAMICS INTERNATIONAL
- Ceramic TiC/a:C protective nanocomposite coatings: Structure and composition versus mechanical properties and tribology
- (2016) Nikolett Oláh et al. CERAMICS INTERNATIONAL
- Synthesis of Ti matrix composites reinforced with TiC particles: thermodynamic equilibrium and change in microstructure
- (2016) Jérôme Roger et al. JOURNAL OF MATERIALS SCIENCE
- Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
- (2016) Jun Beom Kim et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- Structure, optical properties and thermal stability of TiC-based tandem spectrally selective solar absorber coating
- (2016) Xiang-Hu Gao et al. SOLAR ENERGY MATERIALS AND SOLAR CELLS
- Investigation of thermal atomic layer deposited TiAlX (X=N or C) film as metal gate
- (2016) Jinjuan Xiang et al. SOLID-STATE ELECTRONICS
- Post annealing effects on structural, optical and electrical properties of CuSbS2 thin films fabricated by combinatorial thermal evaporation technique
- (2016) Arshad Hussain et al. SUPERLATTICES AND MICROSTRUCTURES
- TiC crystallite formation and the role of interfacial energies on the composition during the deposition process of TiC/a:C thin films
- (2016) Nikolett Oláh et al. SURFACE & COATINGS TECHNOLOGY
- In situ synthesized TiC–DLC nanocomposite coatings on titanium surface in acetylene ambient
- (2015) Y.R. Xu et al. APPLIED SURFACE SCIENCE
- Specialized investigations on physical and morphological features of TiC thin films synthesized by PECVD method
- (2015) Ramin Alipour et al. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
- Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
- (2015) Choong-Ki Kim et al. SOLID-STATE ELECTRONICS
- Deposition and characterization of titanium carbide thin films by magnetron sputtering using Ti and TiC targets
- (2014) Amina Zouina Ait Djafer et al. APPLIED SURFACE SCIENCE
- Examination of nanocrystalline TiC/amorphous C deposited thin films
- (2014) Nikolett Oláh et al. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
- Microstructure and phase composition dependent tribological properties of TiC/a-C nanocomposite thin films
- (2014) N. Kumar et al. SURFACE & COATINGS TECHNOLOGY
- In situ formation of Ti alloy/TiC porous composites by rapid microwave sintering of Ti6Al4V/MWCNTs powder
- (2013) C.Y. Tang et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Growth of Highly Conformal TiCxFilms Using Atomic Layer Deposition Technique
- (2013) Tae Eun Hong et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Structural and biocompatible characterization of TiC/a:C nanocomposite thin films
- (2013) K. Balázsi et al. Materials Science & Engineering C-Materials for Biological Applications
- Structure and mechanical properties of TiC films deposited using combination of pulsed DC and normal DC magnetron co-sputtering
- (2012) K.H.T. Raman et al. APPLIED SURFACE SCIENCE
- Titanium carbide and its core-shelled derivative TiC@TiO2 as catalyst supports for proton exchange membrane fuel cells
- (2012) Anna Ignaszak et al. ELECTROCHIMICA ACTA
- Surface analytical study of carbothermally reduced titania films for electrocatalysis application
- (2012) Celine Rüdiger et al. ELECTROCHIMICA ACTA
- Study on structural, morphological and electrical properties of sputtered titanium nitride films under different argon gas flow
- (2012) Nishat Arshi et al. MATERIALS CHEMISTRY AND PHYSICS
- Preparation of single-crystal TiC (111) by radio frequency magnetron sputtering at low temperature
- (2012) Q. Qi et al. THIN SOLID FILMS
- Comparative study of titanium carbide and nitride coatings grown by cathodic vacuum arc technique
- (2011) D.M. Devia et al. APPLIED SURFACE SCIENCE
- Effects of duty cycle on microstructure and corrosion behavior of TiC coatings prepared by DC pulsed plasma CVD
- (2011) Ali Shanaghi et al. APPLIED SURFACE SCIENCE
- Development and characterization of high temperature stable Ta–W–Si–C amorphous metal gates
- (2010) Melody E. Grubbs et al. APPLIED PHYSICS LETTERS
- Grain-Orientation Induced Work Function Variation in Nanoscale Metal-Gate Transistors—Part II: Implications for Process, Device, and Circuit Design
- (2010) Hamed F Dadgour et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Chemical Solution Deposition of Epitaxial Carbide Films
- (2010) Guifu Zou et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
- Raman spectroscopy investigations of TiBxCyNz coatings deposited by low pressure chemical vapor deposition
- (2010) Ines Dreiling et al. SURFACE & COATINGS TECHNOLOGY
- Effect of annealing on electrical resistivity of rf-magnetron sputtered nanostructured SnO2 thin films
- (2009) Abdul Faheem Khan et al. APPLIED SURFACE SCIENCE
- Effect of annealing on structural, optical and electrical properties of nanostructured Ge thin films
- (2009) Abdul Faheem Khan et al. APPLIED SURFACE SCIENCE
- Effect of adhesive and cohesive strength on the tribological behaviour of non-reactively sputtered TiC thin films
- (2009) S. Kataria et al. SURFACE AND INTERFACE ANALYSIS
- Reactive sputtering of titanium in Ar/CH4 gas mixture: Target poisoning and film characteristics
- (2009) O.A. Fouad et al. THIN SOLID FILMS
- The influence of surface roughness on electrical conductance of thin Cu films: An ab initio study
- (2008) V. Timoshevskii et al. JOURNAL OF APPLIED PHYSICS
- Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates
- (2008) Yueh-Chien Lee et al. JOURNAL OF LUMINESCENCE
- Electron-emission properties of titanium carbide-coated carbon nanotubes grown on a nano-sized tungsten tip
- (2008) Young-Kwang Kim et al. THIN SOLID FILMS
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