Sub‐Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal–Oxide–Semiconductor‐Compatible Aluminum Electrodes

标题
Sub‐Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal–Oxide–Semiconductor‐Compatible Aluminum Electrodes
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume -, Issue -, Pages 2000575
出版商
Wiley
发表日期
2021-02-06
DOI
10.1002/pssr.202000575

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