Atomic layer deposited Mo2N thin films using Mo(CO)6 and NH3 plasma as a Cu diffusion barrier
出版年份 2020 全文链接
标题
Atomic layer deposited Mo2N thin films using Mo(CO)6 and NH3 plasma as a Cu diffusion barrier
作者
关键词
Mo, 2, N thin films, Mo(CO), 6, Plasma power, Resistivity, Diffusion barrier
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 858, Issue -, Pages 158314
出版商
Elsevier BV
发表日期
2020-12-17
DOI
10.1016/j.jallcom.2020.158314
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Hydrogen Evolution Reaction by Atomic Layer-Deposited MoN x on Porous Carbon Substrates: The Effects of Porosity and Annealing on Catalyst Activity and Stability
- (2020) Rahul Ramesh et al. ChemSusChem
- Atomic-Layer-Deposited MoNx Thin Films on Three-Dimensional Ni Foam as Efficient Catalysts for the Electrochemical Hydrogen Evolution Reaction
- (2019) Rahul Ramesh et al. ACS Applied Materials & Interfaces
- New development of atomic layer deposition: processes, methods and applications
- (2019) Peter Ozaveshe Oviroh et al. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS
- Evaluation of hydrogen evolution reaction activity of molybdenum nitride thin films on their nitrogen content
- (2019) Miroslava Kozejova et al. ELECTROCHIMICA ACTA
- Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
- (2019) Jun Beom Kim et al. THIN SOLID FILMS
- Some Insights into Atomic Layer Deposition of MoNx Using Mo(CO)6 and NH3 and Its Diffusion Barrier Application
- (2019) Tae Hyun Kim et al. CHEMISTRY OF MATERIALS
- Low temperature atomic layer deposited molybdenum nitride-Ni-foam composite: An electrode for efficient charge storage
- (2018) Dip K. Nandi et al. ELECTROCHEMISTRY COMMUNICATIONS
- Negative electrode materials of molybdenum nitride/N-doped carbon nano-fiber via electrospinning method for high-performance supercapacitors
- (2018) Yongtao Tan et al. ELECTROCHIMICA ACTA
- Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
- (2018) Martijn F. J. Vos et al. Journal of Physical Chemistry C
- Effect of nitrogen flow rate on structure and properties of MoN x coatings deposited by facing target sputtering
- (2017) Tao Wang et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Updates on the development of nanostructured transition metal nitrides for electrochemical energy storage and water splitting
- (2017) Muhammad-Sadeeq Balogun et al. Materials Today
- Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
- (2016) Yujin Jang et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Nitrogen incorporation in sputter deposited molybdenum nitride thin films
- (2016) Laura Stöber et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
- (2016) Jun Beom Kim et al. MATERIALS LETTERS
- Formation of N-doped molybdenum carbide confined in hierarchical and hollow carbon nitride microspheres with enhanced sodium storage properties
- (2016) Jiyicheng Qiu et al. Journal of Materials Chemistry A
- Impact of sputter deposition parameters on molybdenum nitride thin film properties
- (2015) L Stöber et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Synthesis, electron transport properties of transition metal nitrides and applications
- (2015) R.S. Ningthoujam et al. PROGRESS IN MATERIALS SCIENCE
- The Hardest Superconducting Metal Nitride
- (2015) Shanmin Wang et al. Scientific Reports
- Atomic Layer Deposited Molybdenum Nitride Thin Film: A Promising Anode Material for Li Ion Batteries
- (2014) Dip K. Nandi et al. ACS Applied Materials & Interfaces
- Molybdenum nitride/nitrogen-doped graphene hybrid material for lithium storage in lithium ion batteries
- (2014) Botao Zhang et al. ELECTROCHIMICA ACTA
- Nanostructured transition metal nitrides for energy storage and fuel cells
- (2013) Shanmu Dong et al. COORDINATION CHEMISTRY REVIEWS
- Hydrogen-Evolution Catalysts Based on Non-Noble Metal Nickel-Molybdenum Nitride Nanosheets
- (2012) Wei-Fu Chen et al. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
- Plasma energy and work function of conducting transition metal nitrides for electronic applications
- (2009) G. M. Matenoglou et al. APPLIED PHYSICS LETTERS
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