A small three-way valve using particle excitation driven by a single piezoelectric transducer for hydraulic actuator

标题
A small three-way valve using particle excitation driven by a single piezoelectric transducer for hydraulic actuator
作者
关键词
Piezoelectric element, Control valve, Hydraulics, Micro-mechanism
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 316, Issue -, Pages 112363
出版商
Elsevier BV
发表日期
2020-10-11
DOI
10.1016/j.sna.2020.112363

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