Flow control valve for pneumatic actuators using particle excitation by PZT vibrator

标题
Flow control valve for pneumatic actuators using particle excitation by PZT vibrator
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 155, Issue 2, Pages 285-289
出版商
Elsevier BV
发表日期
2009-07-22
DOI
10.1016/j.sna.2009.07.005

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