标题
Design and Simulation Analysis of A Z Axis Microactuator with Low Mode Cross-Talk
作者
关键词
-
出版物
JOURNAL OF MECHANICS
Volume -, Issue -, Pages 1-8
出版商
Cambridge University Press (CUP)
发表日期
2020-10-14
DOI
10.1017/jmech.2020.48
参考文献
相关参考文献
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