Epitaxial growth and electrical performance of graphene/3C–SiC films by laser CVD

标题
Epitaxial growth and electrical performance of graphene/3C–SiC films by laser CVD
作者
关键词
Graphene/SiC film, Epitaxial, Laser CVD, Electrical conductivity, Deposition rate
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 826, Issue -, Pages 154198
出版商
Elsevier BV
发表日期
2020-02-06
DOI
10.1016/j.jallcom.2020.154198

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