A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films

出版年份 2020 全文链接

标题

作者

关键词

Oblique angle deposition, W thin films, Tilted columns, Dense, Fibrous morphology

出版物

Volume 264, Issue -, Pages 127381

出版商

Elsevier BV

发表日期

2020-01-22

DOI

10.1016/j.matlet.2020.127381

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