Highly dispersed Co deposited on Al2O3 particles via CoCp2 + H2 ALD

标题
Highly dispersed Co deposited on Al2O3 particles via CoCp2 + H2 ALD
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 31, Issue 17, Pages 175703
出版商
IOP Publishing
发表日期
2020-01-08
DOI
10.1088/1361-6528/ab68e1

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