Internal resonance between the extensional and flexural modes in micromechanical resonators

标题
Internal resonance between the extensional and flexural modes in micromechanical resonators
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 126, Issue 16, Pages 164506
出版商
AIP Publishing
发表日期
2019-10-31
DOI
10.1063/1.5115028

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