4.6 Review

Micromachined Resonators: A Review

期刊

MICROMACHINES
卷 7, 期 9, 页码 -

出版社

MDPI
DOI: 10.3390/mi7090160

关键词

resonance; microresonators; micro-electro-mechanical systems

资金

  1. Hong Kong Research Grants Council [CityU 11206115]
  2. Natural Sciences and Engineering Research Council of Canada (NSERC)
  3. Research Funds of Quebec on Nature and Technologies (FRQNT)

向作者/读者索取更多资源

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Engineering, Electrical & Electronic

High-Precision and Resilient-to-Interference Ultrawideband Two-Way-Ranging Based on Clock-Less Active Reflector in 65-nm CMOS

Shoeib Rahmatollahi, Mohammad Taherzadeh-Sani, Frederic Nabki

Summary: This paper describes an IR-UWB TWR system for indoor and harsh environments. In this system, a sync word with UWB impulses and PPM modulation is transmitted from the anchor and detected by the tag using a continuous-time sync detection mechanism. The tag then reflects a similar sync-word back to the anchor, and the ToF between the transmitted and received sync is calculated to measure the distance. The proposed system reduces sync detection and reply time by using a clock-less active reflector, and mitigates interference by combining OOK and PPM.

IEEE SENSORS JOURNAL (2023)

Article Engineering, Electrical & Electronic

Wideband Cascaded and Stacked Receiver Front-Ends Employing an Improved Clock-Strategy Technique

Arash Abbasi, Frederic Nabki

Summary: A wideband cascaded receiver and a stacked receiver using an improved clock strategy are proposed to support the software-defined radio (SDR). The cascaded receiver achieves a conversion gain from 26 dB to 36 dB, double-sideband noise-figure from 1.4 dB to 3.9 dB, S-11<-10 dB, and an IIP3 from -7.5 dBm to -10.5 dBm over the RF operating band from 0.4 GHz to 12 GHz. The stacked receiver achieves a conversion gain from 34.5 dB to 36 dB, NFDSB from 4.6 dB to 6.2 dB, S-11<-10 dB, and an IIP3 from -21 dBm to -17.5 dBm over the RF operating band from 2.2 GHz to 3.2 GHz.

JOURNAL OF LOW POWER ELECTRONICS AND APPLICATIONS (2023)

Article Engineering, Electrical & Electronic

A 107 pJ/b TX 260 pJ/b RX Ultralow-Power MEMS-Based Transceiver With Wake-Up in ISM-Bands for IoT Applications

Kai Tang, Chuanshi Yang, Yanshu Guo, Nan Wang, Yao Zhu, Ying Zhang, Eldwin Jiaqiang Ng, Joshua En-Yuan Lee, Zhongyuan Fang, Wensong Wang, Hanjun Jiang, Chun-Huat Heng, Yuanjin Zheng

Summary: This article introduces an ultralow-power microelectromechanical system (MEMS)-based transceiver and wake-up receiver. The system supports a shared antenna interface and uses adaptive fast switching technique and high-Q MEMS resonator to reduce power consumption and achieve frequency stability. The MEMS-based modulator provides LO in FSK RX for better interference filtering, and the FSK-matched filter with matching network and current-reuse LNA ensure high blocker/interference rejection with low power. The fabricated TX generates FSK signals with high output power and a data rate of up to 6 Mb/s, while the RX exhibits high sensitivity and in-band signal-to-interference ratio at 2 Mb/s data rate. Overall, the proposed system achieves significant energy efficiency improvement and is suitable for energy-efficient pico-IoT applications.

IEEE JOURNAL OF SOLID-STATE CIRCUITS (2023)

Article Engineering, Electrical & Electronic

Developing a multi-sample acoustofluidic device for high-throughput cell aggregation

Renhua Yang, Siping Huang, Yiwen Zhang, Chao Zhang, Jingui Qian, Raymond H. W. Lam, Joshua E-Y Lee, Zuankai Wang

Summary: In this work, a high-throughput multi-sample acoustofluidic aggregation device is proposed, which can manipulate up to 12 samples simultaneously using a single reusable acoustic tweezer. The device utilizes a polydimethylsiloxane frame as a selective acoustic-absorbing feature to create asymmetric acoustic waves over multiple detachable superstrates. The device can efficiently aggregate multiple samples of various compositions and sizes, ranging from non-bioactive microparticles to bioactive cells.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2023)

Article Chemistry, Analytical

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

Almur A. S. Rabih, Mohammad Kazemi, Michael Menard, Frederic Nabki

Summary: This study presents a novel aluminum nitride-based out-of-plane piezoelectric MEMS actuator equipped with a capacitive sensing mechanism to track its displacement. The actuator can be integrated within PICs to align different chips.

MICROMACHINES (2023)

Article Chemistry, Analytical

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

Zayed Ahmed, Charles Duruaku, Fatemeh Edalatfar, Mehrdad Moallem, Behraad Bahreyni

Summary: We propose a high-performance capacitive accelerometer for particle acceleration detection applications, with a sub-μg noise limit and 1.2 kHz bandwidth. The accelerometer achieves low noise through optimized device design and operation under vacuum to reduce air damping effects. It is designed with two sets of electrodes for high and low electrostatic coupling efficiency, allowing it to operate in high-sensitivity or high-resiliency modes. The device utilizes a closed-loop electrostatic feedback control architecture to counteract large displacements near resonance frequency.

MICROMACHINES (2023)

Article Engineering, Electrical & Electronic

An Energy Efficient Coherent IR-UWB Receiver With Non-Coherent-Assisted Synchronization

Amin Pourvali Kakhki, Mohammad Taherzadeh-Sani, Frederic Nabki

Summary: This paper presents a non-coherent assisted synchronization mechanism for low data rate coherent impulse radio ultra-wide band (IR-UWB) receivers. The proposed hybrid scheme simplifies the coherent synchronization and reduces power consumption by utilizing a two-step acquisition mechanism. The receiver achieves enhanced energy efficiency while maintaining sensitivity benefits of coherent detection.

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS (2023)

Article Chemistry, Analytical

Anchor Loss Reduction in Micro-Electro Mechanical Systems Flexural Beam Resonators Using Trench Hole Array Reflectors

Mohammad Kazemi, Seyedfakhreddin Nabavi, Mathieu Gratuze, Frederic Nabki

Summary: This study investigates the effect of elastic wave reflectors on the quality factor of microelectromechanical resonators. The research found that half-circle-shaped holes facing the anchors yield the most promising results, increasing the quality factor by a factor of 1.70x in air or 1.72x in vacuum.

MICROMACHINES (2023)

Review Nanoscience & Nanotechnology

Thin-film PMUTs: a review of over 40 years of research

Kaustav Roy, Joshua En-Yuan Lee, Chengkuo Lee

Summary: This review discusses the research progress of thin-film PMUTs in the field of microultrasound, highlighting that the research in this field began 44 years ago with the development of functional piezoelectric thin-film materials. Three major companies are currently commercializing thin-film PMUTs on a bulk scale. The review comprehensively covers the extensive development of these devices' design, manufacturing, and function, including the global PMUT outlook, design principles, manufacturing methods, nonconventional PMUT designs, and category-wise applications.

MICROSYSTEMS & NANOENGINEERING (2023)

Proceedings Paper Engineering, Electrical & Electronic

A Low Power Ultra-Wideband RF Receiver Front-End using a Differential N-Path Notch Filter

Ali Poursaadati Zinjanab, Nakisa Shams, Frederic Nabki

Summary: This article presents a low power ultra-wideband (UWB) RF receiver using two N-path notch filters. The receiver architecture consists of two N-path notch filter systems as a Miller feedback network around a low noise amplifier (LNA). The receiver achieves a noise figure (NF) of less than 5.5 dB, a conversion gain of 61 dB, and consumes less than 12 mW from a 1-V supply, including the local oscillator (LO) current.

2023 21ST IEEE INTERREGIONAL NEWCAS CONFERENCE, NEWCAS (2023)

Proceedings Paper Engineering, Electrical & Electronic

Toward 2.5D Structures for Multi-Channel MEMS Acoustic-Based Digital Isolators using Through Silicon Openings

Hamid Sadrimanesh, Yves Blaquiere, Frederic Nabki

Summary: This paper presents a piezoelectric MEMS-based digital isolator that transfers ultrasound waves through the medium of air. A front-to-back 2.5-dimensional structure is also introduced for assembling MEMS dice in the piezoMUMPs process. The front-to-back stacking of dice is possible in this process, reducing the distance between the transmitter and receiver by 43% compared to the conventional method. Additionally, simulations show that the conical shape of the through silicon opening (TSO) has a direct effect on the transmission bit rate, improving it by 3.5 times compared to the straight shape.

2023 21ST IEEE INTERREGIONAL NEWCAS CONFERENCE, NEWCAS (2023)

Proceedings Paper Engineering, Electrical & Electronic

Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch

Abdurrashid Hassan Shuaibu, Yves Blaquiere, Frederic Nabki

Summary: In this study, a cantilever-based electrostatically actuated micro-electro-mechanical systems (MEMS) actuator aimed for a DC switch was investigated in the PolyMUMPs process. A modified design was proposed to overcome the challenge of conformal coverage and improve the contact force, by staking Poly 1 pads onto the substrate while the suspended beam remains in Poly 2. The experimental results showed promising potential for MEMS polysilicon DC switches based on this work.

2023 21ST IEEE INTERREGIONAL NEWCAS CONFERENCE, NEWCAS (2023)

Article Engineering, Electrical & Electronic

Integrated Fast UWB Time-Domain Microwave Breast Screening

Maryam Ghamati, Mohammad Taherzadeh, Frederic Nabki, Milica Popovic

Summary: This article proposes a technique to reduce the complexity and cost in ultra-wideband imaging by digitizing only the peak values and incident-time stamps of the received signal. Experimental results demonstrate that this technique enables fast imaging and achieves low localization error, showing great potential for practical applications.

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT (2023)

Article Engineering, Electrical & Electronic

Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation

Mohammad Kazemi, Seyedfakhreddin Nabavi, Mathieu Gratuze, Frederic Nabki

Summary: This paper presents an innovative method for tuning the resonant frequency of beam resonators using electrostatic actuators, which increases the stiffness of the anchoring structure and significantly enhances the resonant frequency.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2023)

Article Engineering, Electrical & Electronic

Hybrid MEMS Actuator With 3 Degrees-of-Freedom for Efficient Planar Optical Switching

Suraj Sharma, Seyedfakhreddin Nabavi, Almur Abdelkreem Saeed Rabih, Michael Menard, Frederic Nabki

Summary: This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of freedom. The actuator shows good displacement performance and compensation capability, making it suitable for efficient optical switching applications.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2023)

暂无数据