Effect of annealing parameters on optoelectronic properties of highly ordered ZnO thin films

标题
Effect of annealing parameters on optoelectronic properties of highly ordered ZnO thin films
作者
关键词
ZnO thin films, Sputtering, XPS, Sheet resistance, Transmittance, Spectroscopic ellipsometry
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 100, Issue -, Pages 200-213
出版商
Elsevier BV
发表日期
2019-05-14
DOI
10.1016/j.mssp.2019.04.032

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