Fully CMOS-compatible titanium nitride nanoantennas

标题
Fully CMOS-compatible titanium nitride nanoantennas
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 108, Issue 5, Pages 051110
出版商
AIP Publishing
发表日期
2016-02-06
DOI
10.1063/1.4941413

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