Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry

标题
Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry
作者
关键词
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出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 3, Pages H214
出版商
The Electrochemical Society
发表日期
2011-01-04
DOI
10.1149/1.3530090

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