Article
Nanoscience & Nanotechnology
Yang Zou, Chao Gao, Jie Zhou, Yan Liu, Qinwen Xu, Yuanhang Qu, WenJuan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun
Summary: Ba0.8Sc0.2N-based film bulk acoustic wave resonators show great potential in the design of wideband acoustic filters operating in the 5G band, thanks to their high-quality thin film and excellent performance.
MICROSYSTEMS & NANOENGINEERING
(2022)
Article
Computer Science, Information Systems
Qinghua Yang, Yao Xu, Yongle Wu, Weimin Wang, Zhiguo Lai
Summary: This paper designs and fabricates a high-selectivity film bulk acoustic resonator (FBAR) filter chip for the 3.4-3.6 GHz range. The experimental results show that the filter chip has high roll-off and stopband suppression, with most of the stopband suppression better than 35 dB. Error analysis and parameter modification were conducted for future filter design work.
Article
Engineering, Electrical & Electronic
J. Arout Vinita, J. Arout Chelvane, Jitendra Singh
Summary: This paper describes the realization of a miniaturized magnetic field sensor that is based on a film bulk acoustic resonator (FBAR). The sensor has a multilayer stack of thin films with a magnetic field sensing layer and a piezoelectric actuation layer, providing enhanced sensitivity and high frequency performance.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)
Article
Engineering, Electrical & Electronic
Yanmei Xue, Changjian Zhou, Xiu Yin Zhang, Mansun Chan
Summary: This study introduces a flexible lateral-field-excited film bulk acoustic resonator using transferred single-crystalline LiTaO3 piezoelectric thin films, demonstrating high-quality resonators with high Q values and temperature stability for different wave modes, suitable for future flexible front-end modules and temperature sensors.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Engineering, Electrical & Electronic
Poorvi K. Joshi, Meghana A. Hasamnis, Rajendra M. Patrikar
Summary: In this study, we investigate the impact of introducing two-series air gap capacitor and tailoring oxide in thin-film bulk acoustic resonator (FBARs) for thermal compensation at a frequency higher than 5 GHz. This approach reduces the temperature coefficient of frequency of ZnO FBAR to 0.011 ppm/°C within the industrial temperature range at 5.45 GHz. The compensated FBARs exhibit a higher quality factor of 1100 and a motional impedance of 38 O, which significantly surpasses the quality factor of uncompensated FBARs (approximately 120). We also analyze the stress and strain required to achieve an optimal design of compensated FBARs.
JOURNAL OF COMPUTATIONAL ELECTRONICS
(2023)
Article
Chemistry, Analytical
Giovanni Niro, Ilaria Marasco, Francesco Rizzi, Antonella D'Orazio, Marco Grande, Massimo De Vittorio
Summary: Sensing systems are becoming less invasive, and flexible materials offer new opportunities for wearable applications. The use of standard silicon sensors is limited due to their inability to adapt to curved shapes and withstand large deformations. To minimize sensor impacts, wireless transmissions at ultra-high frequencies (UHFs) can be utilized. Thin-film bulk acoustic wave resonators (FBARs) are the most promising choice for climbing radio frequencies in flexible and wearable substrates. This study proposes the design and fabrication of a flexible gravimetric sensor based on FBAR on a polymeric substrate, which shows high electromechanical coupling and avoids the need for membranes, resulting in a faster and cheaper fabrication process and higher robustness. The device exhibits promising mass sensitivity, paving the way for a new generation of wearable MEMS sensors using UHF transmissions.
Article
Engineering, Electrical & Electronic
Arun Kishor Johar, Gaurav Kumar Sharma, Tangudu Bharat Kumar, Tarun Varma, C. Periasamy, Ajay Agarwal, D. Boolchandani
Summary: This study presents an optimized design of a flexible film bulk acoustic resonator sensor for toluene gas detection, utilizing piezoelectric materials and a PDMS coated electrode. The sensor showed a sensitivity of 12 kHz/ppm and achieved high performance values for coupling coefficient, quality factor, and figure of merit.
JOURNAL OF ELECTRONIC MATERIALS
(2021)
Article
Acoustics
Cong Chen, Libing Bai, Jie Zhang, Lulu Tian, Quan Zhou, Hong Zhou, Dongxiao Li, Xiaojing Mu
Summary: In this study, a composite nanomechanical resonant magnetometer with a magnetoelastic thin film integrated on a film bulk acoustic resonator (FBAR) surface is reported. The use of the delta-E effect of the magnetoelastic thin film and resonance characteristic in the piezoelectric thin film allows for ultrahigh resonance frequency and excellent magnetic field sensitivity, significantly improving the limit of detection for weak magnetic fields.
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
(2022)
Article
Chemistry, Analytical
Yuxuan Hu, Bo Dong, Liang Lei, Zhizhong Wang, Shuangchen Ruan
Summary: This article presents a film bulk acoustic resonator (FBAR) based on a polymer air cavity. The polymer reflective layer on the cavity serves as both the reflective layer and the function layer for inducing high-order mode resonance. By using aluminum nitride as the piezoelectric layer, the FBAR can achieve a resonance frequency of 6.360 GHz, as determined by the finite element method. The product of the corresponding frequency and quality factor, f x Q, is greater than 2 x 10(13). This design provides a good solution for high-frequency filters and high-sensitivity sensor designs.
Article
Chemistry, Analytical
Yusi Zhu, Pan Xia, Jihang Liu, Zhen Fang, Lidong Du, Zhan Zhao
Summary: This paper presents a polyimide-based film bulk acoustic resonator (PI-FBAR) humidity sensor for real-time human respiration monitoring with high sensitivity and stability. The sensor can sense different breathing conditions and rates, and has potential applications in health assessment and the medical field.
Article
Engineering, Electrical & Electronic
Arun Kishor Johar, Jai Kumar Bhatt, Yogendra Kumar Upadhyaya, Ashutosh Tripathi, Gaurav Kumar Sharma, C. Periasamy, Tarun Varma, Dharmendar Boolchandani, Ajay Agarwal
Summary: In this article, the F-FBAR device is designed by placing a piezoelectric material (PZT) between two metal (Al) electrodes on top of a Bragg's reflector structure, which is mounted on a flexible substrate. The resonance properties of the F-FBAR have been investigated through finite element method (FEM) simulations, and the effects of acoustic impedance layer thickness variation on sensor efficiency have been studied. This study provides new insights in the design of high-performance F-FBAR sensors. It is also reported that the placement of the bottom electrode just above the high or low acoustic impedance layer can enhance the coupling coefficient or the quality factor, respectively.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
(2023)
Article
Acoustics
Yurun Chen, Yan Guo, Rongxing Wu, Ji Wang, Huimin Jing, Ji Lin, Yahui Tian, Haifeng Zhang
Summary: The fast reduction in size of film bulk acoustic wave resonators results in enhanced electric fields and potential large deformations in operating devices. Therefore, the nonlinear behavior and accompanying properties of the resonator need to be considered in development and optimization for improved performance. A nonlinear formulation is presented for multilayered film bulk acoustic resonators, allowing analysis of vibration frequencies and mode shapes with consideration of larger mechanical deformations. Extensive research efforts have been made analytically and experimentally to understand the nonlinear behavior and properties, catering to the demands of communication and network technologies.
Article
Acoustics
Jieyi Zhu, Meiyan Feng, Guofu Lian
Summary: Measurement of volatile solutions is crucial for laboratory and hospital safety. This paper presents an ethanol-sensing and acetone-sensing device using a film bulk acoustic resonator (FBAR) and discusses the sensing mechanisms.
SHOCK AND VIBRATION
(2022)
Article
Chemistry, Analytical
Yuanhang Qu, Tiancheng Luo, Zhiwei Wen, Min Wei, Xiyu Gu, Xiang Chen, Yang Zou, Yao Cai, Yan Liu, Chengliang Sun
Summary: In this paper, an AlN-based adjustable K-eff(2) FBAR was designed by introducing parallel capacitors around the active area of the resonator. The effects of different support column widths on K-eff(2) were verified through finite element simulation and experimental fabrication. The measured results showed that the designed FBAR with support columns achieved a 25.9% adjustable K-eff(2) value.
Article
Chemistry, Analytical
Chao Gao, Yang Zou, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai, Chengliang Sun
Summary: As radio-frequency communication becomes more common, film bulk acoustic resonators (FBAR) have attracted attention for their superior performance. This study proposes a method to tune the FBAR's performance by etching the piezoelectric material, and investigates the effect of etching trench position on the FBAR's properties.
Article
Multidisciplinary Sciences
Yang Yang, Lin Zhang, Ke Jin, Meihang He, Wei Wei, Xuejiao Chen, Qingrui Yang, Yanyan Wang, Wei Pang, Xiubao Ren, Xuexin Duan
Summary: This study demonstrates a method for manipulating nanoparticles through the formation and adjustment of a virtual channel using acoustic waves and microfluidics. The technology allows in situ enrichment, focusing, and separation of nanoparticles below 200 nanometers.
Article
Chemistry, Multidisciplinary
Xueyou Sun, Jizhou Hu, Xu Yan, Tiechuan Li, Ye Chang, Hemi Qu, Wei Pang, Xuexin Duan
Summary: This paper presents a novel multimode CNT sensor, which improves fabrication repeatability by embedding a MEMS-based BAW resonator underneath the CNT layer and accelerates gas desorption rate by acoustic stimulation. Compared to traditional single mode detectors, the multimode CNT sensor exhibits improved sensitivity and dynamic range, making it suitable for gas identification in GC systems.
Article
Chemistry, Analytical
Xingda Dai, Shuaihua Zhang, Siyuan Liu, Hang Qi, Xuexin Duan, Ziyu Han, Jiehua Wang
Summary: This study used microfluidic flow cytometry to assess the effects of external factors on intracellular reactive oxygen species and auxin levels in protoplasts, and demonstrated previously underestimated phenotypic variability within a protoplast population.
Article
Chemistry, Analytical
Jiuyan Li, Xuexin Duan, Chen Wu
Summary: Aggregation-dependent brightness (ADB) indirectly limits the in vitro performance of a pure aggregation-induced emission (AIE) probe in many ways; thus, controlling the aggregation state of the AIE probe is helpful for detecting an object of interest. An acoustic streaming tweezer (AST) generated using a gigahertz bulk acoustic wave resonator was applied to manipulate the aggregation status of the AIE probe and enhance their performance for human serum albumin (HSA) detection. Due to the ADB effect, the fluorescence intensity strongly increased, and the detection limit of HSA was reduced to 0.5 μg/mL, making it suitable for kidney disease detection. Such an AST-assisted ADB strategy can be applied to other AIE probes and serve as a portable choice for biomedical detection.
ANALYTICAL CHEMISTRY
(2023)
Review
Chemistry, Analytical
Wei Wei, Yaping Wang, Zhaoxun Wang, Xuexin Duan
Summary: Acoustofluidics, a branch of microfluidics, has developed rapidly in recent decades, with applications in various biomedical and bioanalytical fields. The manipulation of liquids and bioparticles using acoustic pressure and acoustic streaming effects is the main focus of acoustofluidics. While the use of acoustic radiation force has been extensively studied, the recent development of new piezoelectric devices has sparked interest in particle manipulations using drag force induced by acoustic streaming. This review article summarizes the recent advancements in microscale acoustic streaming, including high-frequency transducer-induced high-speed streaming, confinement and programed streaming, and acoustic streaming tweezers, which combine acoustic radiation force and drag force to overcome size limitations in conventional acoustic manipulations. The article also provides a brief overview of acoustic streaming theory, its generation, applications, and key issues in the field. Lastly, the future prospects of micro acoustic streaming in bioanalytical and biomedical applications are discussed.
TRAC-TRENDS IN ANALYTICAL CHEMISTRY
(2023)
Article
Rheumatology
Zhiyan Wang, Mingdong Yang, Qunqun Zhang, Suhua Zhang, Haifang Sui, Jiane Liu, Qingrui Yang
Summary: Blau syndrome (BS) is a rare genetic immune disease commonly seen in childhood, with a high miss-rate of diagnosis and lack of effective clinical management. This case report presents a 54-year-old Chinese male patient with hand malformation, fever, skin rash, and joint pain, who was ultimately diagnosed through medical history and genetic analysis. The report aims to raise awareness among clinicians for accurate diagnosis and appropriate treatment of this rare clinical entity.
INTERNATIONAL JOURNAL OF RHEUMATIC DISEASES
(2023)
Review
Chemistry, Multidisciplinary
Xian Chen, Xuexin Duan, Yunhua Gao
Summary: Point-of-care testing (POCT) has played a crucial role in various fields due to its faster turnaround compared to laboratory testing. The development of micro- and nanotechnology has led to the emergence of acoustofluidics, which utilizes acoustic waves to manipulate fluids and particles, and has been widely applied in POCT research.
Article
Chemistry, Multidisciplinary
Shuting Pan, Rui You, Xian Chen, Wenwei Pan, Quanning Li, Xuejiao Chen, Wei Pang, Xuexin Duan
Summary: In this study, the authors propose an approach that utilizes a gigahertz (GHz) resonator to enable acoustic streaming for improving mass transfer and biofouling removal in micro-/nanoscale affinity biosensors. By tuning the deviation angle, a, the flow mode and shear mode can be switched, overcoming diffusion limitations and enhancing binding while removing biofouling. Experimental results show a 34-fold enhancement in initial binding rate, indicating the potential of this approach for biosensing and lab-on-chip systems.
Article
Materials Science, Biomaterials
Wenwei Pan, Ziyu Han, Ye Chang, Xu Yan, Feng Zhou, Sihong Shen, Xuexin Duan
Summary: This study designed three polyelectrolytes that can form different biosensing surfaces with varying interfacial characteristics. The surface density and binding behaviors of the polyelectrolyte surfaces with proteins and virus particles were studied using quartz crystal microbalance, interferometry, and atomic force microscopy. A multivalent adsorption kinetic model was developed to estimate the number of bonds between the viral particles and polyelectrolyte surfaces. The experimental results showed that the heterogeneous 3D surface with a jagged forest-like structure enhanced virus capture ability through maximizing multivalent interactions. Specific coronavirus detection was achieved in spiked swab samples, indicating the importance of both probe density and spatial arrangement for sensing performance and rational biosensing surface design.
JOURNAL OF MATERIALS CHEMISTRY B
(2023)
Article
Chemistry, Analytical
Chen Wu, Jiuyan Li, Xuexin Duan
Summary: Aggregation-dependent brightness (ADB) indirectly hinders the performance of a pure aggregation-induced emission (AIE) probe in vitro, but controlling the aggregation state of AIE probe can improve its detection of objects of interest. This study applies an acoustic streaming tweezer (AST) to manipulate the aggregation status of AIE probes using gigahertz bulk acoustic wave resonator, thus enhancing their performance in human serum albumin (HSA) detection. The AST traps AIE nanoparticles, triggering larger aggregates and increasing fluorescence intensity through the ADB effect, effectively reducing the HSA detection limit to 0.5 µg/mL suitable for kidney disease detection. This AST-assisted ADB strategy shows potential for biomedical detection and can be used as a portable choice.
ANALYTICAL CHEMISTRY
(2023)
Article
Chemistry, Multidisciplinary
Haipeng Cui, Wenwei Pan, Tiechuan Li, Xiaotian Shen, Ye Chang, Wei Pang, Xuexin Duan
Summary: Virus infections are a major cause of illness and death worldwide. Current diagnostic methods require RT-PCR technology, but separating and enriching virus particles from complex and diluted samples is still a major challenge. This study proposes a micromotor-based sample preparation concept that efficiently separates and concentrates target virus particles before PCR.
Article
Chemistry, Multidisciplinary
Haipeng Cui, Wenwei Pan, Tiechuan Li, Xiaotian Shen, Ye Chang, Wei Pang, Xuexin Duan
Summary: Virus infections are a major cause of morbidity and mortality worldwide, and the current standard method for diagnosing pathogens, RT-PCR, requires improvement in the separation and enrichment of target particles. In this study, a micromotor-based sample preparation concept was proposed which significantly enhanced the efficiency and recovery rate of virus enrichment.
Article
Biochemical Research Methods
Yangchao Zhou, Meihang He, Haitao Zhang, Bohua Liu, Chongling Sun, Ziyu Han, Xuexin Duan
Summary: We propose a nozzle-free acoustic-based method for generating droplets with diameters ranging from 2 to 1800 mu m using a gigahertz (GHz) bulk acoustic wave (BAW). This method is versatile, scalable, and compatible with handling viable samples.
Article
Chemistry, Multidisciplinary
Xueyou Sun, Jizhou Hu, Xu Yan, Tiechuan Li, Ye Chang, Hemi Qu, Wei Pang, Xuexin Duan
Summary: This research reports a novel on-chip monolithic integrated multimode CNT sensor, which addresses the issues of fabrication reproducibility, long desorption time, limited sensitivity, and low dynamic range in current CNT-based gas detectors. The repeatability of device fabrication was improved by monitoring CNT deposition using BAW. The acoustic stimulation accelerated the gas desorption rate and the multimode CNT sensor showed improved sensitivity and dynamic range compared to a single mode detector.
Article
Nanoscience & Nanotechnology
Xu Yan, Hemi Qu, Ye Chang, Wei Pang, Xuexin Duan
Summary: This study develops a portable gas sensing instrument for the detection of chemical warfare agents (CWAs). The instrument consists of a micro-preconcentrator (mu PC) and a film bulk acoustic resonator (FBAR) gas sensor and offers advantages such as high sensitivity and rapid detection. By coating the mu PC with a nanoporous metal-organic framework material, effective sample pretreatment is achieved. The combination of mu PC and FBAR in one instrument maximizes their respective advantages, reducing the limit of detection of the analyte. The compact size and high portability of the prototype instrument make it suitable for in-field detection of CWAs.
NANOTECHNOLOGY AND PRECISION ENGINEERING-NAMI JISHU YU JINGMI GONGCHENG
(2022)
