Resonant Magnetometer for Ultra-Low Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator

标题
Resonant Magnetometer for Ultra-Low Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
作者
关键词
-
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2022-01-19
DOI
10.1109/tuffc.2022.3144392

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