Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope

标题
Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope
作者
关键词
-
出版物
Micromachines
Volume 10, Issue 4, Pages 264
出版商
MDPI AG
发表日期
2019-04-22
DOI
10.3390/mi10040264

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