Thermal expansion of magnetron sputtered TiCxN1-x coatings studied by high-temperature X-ray diffraction

标题
Thermal expansion of magnetron sputtered TiCxN1-x coatings studied by high-temperature X-ray diffraction
作者
关键词
Thermal expansion, Titanium carbonitride, High-temperature X-ray diffraction, Physical vapor deposition, Hard coatings
出版物
THIN SOLID FILMS
Volume -, Issue -, Pages -
出版商
Elsevier BV
发表日期
2019-05-13
DOI
10.1016/j.tsf.2019.05.026

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