Thermal atomic layer deposition of AlOxNy thin films for surface passivation of nano-textured flexible silicon

出版年份 2019 全文链接

标题

作者

关键词

Black flexible silicon, Aluminum oxynitride, Surface passivation, Thermal atomic layer deposition, Time-of-flight elastic recoil detection analysis (ToF-ERDA)

出版物

SOLAR ENERGY MATERIALS AND SOLAR CELLS

Volume 193, Issue -, Pages 231-236

出版商

Elsevier BV

发表日期

2019-01-24

DOI

10.1016/j.solmat.2019.01.019

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