Investigation of the power transfer efficiency in a radio-frequency driven negative hydrogen ion source
出版年份 2019 全文链接
标题
Investigation of the power transfer efficiency in a radio-frequency driven negative hydrogen ion source
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 125, Issue 17, Pages 173303
出版商
AIP Publishing
发表日期
2019-05-07
DOI
10.1063/1.5091554
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
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