Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
出版年份 2018 全文链接
标题
Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 25, Issue 1, Pages 013515
出版商
AIP Publishing
发表日期
2018-01-18
DOI
10.1063/1.5006892
参考文献
相关参考文献
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- Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
- (2010) Hyo-Chang Lee et al. APPLIED PHYSICS LETTERS
- Nonlocal electron kinetics in gas-discharge plasma
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- Status of the ITER heating neutral beam system
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- Electron kinetics in glows—from Langmuir to the present
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- Low pressure and high power rf sources for negative hydrogen ions for fusion applications (ITER neutral beam injection) (invited)
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