Fractal and statistical characterization of Ti thin films deposited by RF-magnetron sputtering: The effects of deposition time

标题
Fractal and statistical characterization of Ti thin films deposited by RF-magnetron sputtering: The effects of deposition time
作者
关键词
Ti thin film, Sputtering, Fractal, Surface morphology, AFM
出版物
OPTIK
Volume 178, Issue -, Pages 231-242
出版商
Elsevier BV
发表日期
2018-10-10
DOI
10.1016/j.ijleo.2018.10.050

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