4.6 Article

RF magnetron-sputtered Al-ZnO/Ag/Al-ZnO (AAA) multilayer electrode for transparent and flexible thin-film heater

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JOURNAL OF MATERIALS SCIENCE
卷 54, 期 9, 页码 7062-7071

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SPRINGER
DOI: 10.1007/s10853-019-03376-0

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  1. NSF-CREST (CNBMD) [HRD 1036494]
  2. NSF-CREST [HRD-1547771]

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We report the electrothermal properties of AAA trilayer on polyethylene terephthalate substrate which allowed the development of low-cost high-performance transparent thin-film flexible heater (TTFFH) using RF magnetron sputtering. The structural, electrical, and optical properties of the AAA trilayer were investigated at different thickness of the Ag interlayer. The AAA trilayer-based TTFFH yielded saturation temperatures beyond 100 degrees C at 10 V at optimized Ag interlayer thickness of 5 nm. The time-dependent temperature profile along with its highly stable and reversible thermal behavior was studied. Most importantly, the AAA trilayer-based TTFFH provides a high-performance alternative to the conventional and expensive ITO electrodes at a much lower cost.

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