Sawing stress of SiC single crystal with void defect in diamond wire saw slicing

标题
Sawing stress of SiC single crystal with void defect in diamond wire saw slicing
作者
关键词
SiC single crystal, Wire saw, Sawing stress, void defect, Finite element analysis
出版商
Springer Nature
发表日期
2019-03-29
DOI
10.1007/s00170-019-03579-4

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