Hypersonic Surface Phononic Bandgap Demonstration in a CMOS-Compatible Pillar-Based Piezoelectric Structure on Silicon
出版年份 2018 全文链接
标题
Hypersonic Surface Phononic Bandgap Demonstration in a CMOS-Compatible Pillar-Based Piezoelectric Structure on Silicon
作者
关键词
-
出版物
Physical Review Applied
Volume 10, Issue 6, Pages -
出版商
American Physical Society (APS)
发表日期
2018-12-08
DOI
10.1103/physrevapplied.10.064019
参考文献
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