Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power

出版年份 2018 全文链接

标题

作者

关键词

Titanium aluminum silicon nitride, Coating, Modulated pulsed power magnetron sputtering, Nanocomposite, Fracture toughness, Flexibility, Hardness

出版物

THIN SOLID FILMS

Volume 669, Issue -, Pages 377-386

出版商

Elsevier BV

发表日期

2018-10-24

DOI

10.1016/j.tsf.2018.10.031

向作者/读者发起求助以获取更多资源

Protocol

在线求助

Reagent

在线求助

Reprint

联系作者

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More