Few-Layer MoS2 p-Type Devices Enabled by Selective Doping Using Low Energy Phosphorus Implantation

标题
Few-Layer MoS2 p-Type Devices Enabled by Selective Doping Using Low Energy Phosphorus Implantation
作者
关键词
-
出版物
ACS Nano
Volume 10, Issue 2, Pages 2128-2137
出版商
American Chemical Society (ACS)
发表日期
2016-01-21
DOI
10.1021/acsnano.5b06529

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