Zirconium oxynitride films: Modulation of component as a function of the preparation parameters

标题
Zirconium oxynitride films: Modulation of component as a function of the preparation parameters
作者
关键词
-
出版物
MODERN PHYSICS LETTERS B
Volume 32, Issue 34n36, Pages 1840066
出版商
World Scientific Pub Co Pte Lt
发表日期
2018-11-16
DOI
10.1142/s0217984918400663

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