Chemical composition and microstructure of zirconium oxynitride thin layers from the surface to the substrate-coating interface

标题
Chemical composition and microstructure of zirconium oxynitride thin layers from the surface to the substrate-coating interface
作者
关键词
Zirconium oxinitride, Coatings, Crystal structure, Physical vapor deposition, Transmission electron microscopy, X-ray photoelectron spectroscopy
出版物
MATERIALS CHARACTERIZATION
Volume 131, Issue -, Pages 450-458
出版商
Elsevier BV
发表日期
2017-07-20
DOI
10.1016/j.matchar.2017.07.035

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