Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

标题
Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching
作者
关键词
Metal-assisted chemical etching, Silicon nanowire arrays, Silicon nanohole arrays, Silver thin film dewetting
出版物
Nanoscale Research Letters
Volume 8, Issue 1, Pages 155
出版商
Springer Nature
发表日期
2013-04-05
DOI
10.1186/1556-276x-8-155

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