Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices

The electrical properties of low pressure chemical vapor deposition Ga doped ZnO thin films depending on chemical bonding configuration

(2014) Hanearl Jung et al.   APPLIED SURFACE SCIENCE

Enhanced Light Extraction for InGaN/GaN LEDs Using Zn and Mg Driven-In ALD-GZO as Transparent Conducting Layer

(2013) Chung-Yen Lee et al.   IEEE ELECTRON DEVICE LETTERS

Planar InGaAs p-i-n Photodiodes With Transparent-Conducting-Based Antireflection and Double-Path Reflector

(2013) Yueh-Lin Lee et al.   IEEE ELECTRON DEVICE LETTERS

Effects of Passivation Layer and Post-Annealing on Ga-Doped ZnO Films Grown by ALD

(2013) Yung-Fu Chang et al.   ECS Journal of Solid State Science and Technology

The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition

(2013) Yueh-Lin Lee et al.   ECS Journal of Solid State Science and Technology

Performance of InGaN/GaN MQW LEDs Using Ga-Doped ZnO TCLs Prepared by ALD

(2012) Kuo-Yi Yen et al.   IEEE PHOTONICS TECHNOLOGY LETTERS

The properties of plasma-enhanced atomic layer deposition (ALD) ZnO thin films and comparison with thermal ALD

(2010) Doyoung Kim et al.   APPLIED SURFACE SCIENCE

Effects of dopant (Al, Ga, and In) on the characteristics of ZnO thin films prepared by RF magnetron sputtering system

(2010) Kyu Ung Sim et al.   CURRENT APPLIED PHYSICS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Widely Tunable MEMS-Based Fabry–Perot Filter

(2009) J.S. Milne et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effect of post-annealing on the optoelectronic properties of ZnO:Ga films prepared by pulsed direct current magnetron sputtering

(2009) W.T. Yen et al.   THIN SOLID FILMS

Annealing effects on electrical and optical properties of ZnO films deposited on GaAs by metal organic chemical vapor deposition

(2008) Jingchang Sun et al.   APPLIED SURFACE SCIENCE