Mechanical Behavior of Diamond-Sawn Multi-Crystalline Silicon Wafers and its Improvement

标题
Mechanical Behavior of Diamond-Sawn Multi-Crystalline Silicon Wafers and its Improvement
作者
关键词
Multi-crystalline silicon, Diamond wire saw, Critical strain, Breakage
出版物
Silicon
Volume 6, Issue 2, Pages 129-135
出版商
Springer Nature
发表日期
2013-12-16
DOI
10.1007/s12633-013-9170-2

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