Broadband antireflection silicon carbide surface by self-assembled nanopatterned reactive-ion etching

标题
Broadband antireflection silicon carbide surface by self-assembled nanopatterned reactive-ion etching
作者
关键词
-
出版物
Optical Materials Express
Volume 3, Issue 1, Pages 86
出版商
The Optical Society
发表日期
2012-12-20
DOI
10.1364/ome.3.000086

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