4.7 Article

Surface effects of hybrid vibration-assisted femtosecond laser system for micro-hole drilling of copper substrate

期刊

出版社

ELSEVIER
DOI: 10.1016/S1003-6326(12)61807-X

关键词

femtosecond laser; hybrid machining; vibration-assisted machining; surface roughness; aspect ratio

资金

  1. NCRC (National Core Research Center) Program through the National Research Foundation of Korea [2010-0008-277]
  2. Ministry of Education, Science and Technology

向作者/读者索取更多资源

The ultrafast laser based hybrid machining system was studied and a novel approach was demonstrated to improve laser machining quality on metals by vibrating the optical objective lens with a low frequency (500 Hz) and various displacements (0-16.5 mu m) during a femtosecond laser machining process. The laser used in this experiment is an amplified Ti:sapphire femtosecond (10(-15) s) laser system that generates 100 femtosecond pulses having an energy of 3.5 mJ/pulse with a 5 kHz repetition rate at a central wavelength of 790 nm. It is found that both the wall surface finish of the machined structures and the aspect ratio obtained using the frequency vibration assisted laser machining are improved compared with those derived via laser machining without vibration assistance.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据