Structural, optical and mechanical properties of amorphous and crystalline alumina thin films

标题
Structural, optical and mechanical properties of amorphous and crystalline alumina thin films
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 568, Issue -, Pages 19-24
出版商
Elsevier BV
发表日期
2014-08-08
DOI
10.1016/j.tsf.2014.07.053

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