Large-grained (111)-oriented Si/Al/SiO2 structures formed by diffusion-controlled Al-induced layer exchange

出版年份 2013 全文链接

标题

作者

关键词

出版物

THIN SOLID FILMS

Volume 557, Issue -, Pages 147-150

出版商

Elsevier BV

发表日期

2013-08-16

DOI

10.1016/j.tsf.2013.08.044

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THIN SOLID FILMS

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